QMACS is already providing precision vapor and plasma monitoring in top Silicon Valley and German companies. This unique technique has been industrialized and provides immediate feedback for process control with millisecond response time into etch or other processes.
QMACS stands for Quantum Cascade Laser Measurement And Control System. QMACS is an absorption spectrometer in the mid infrared (3 - 20 μm) spectral range. QMACS works at room temperature without extensive cooling and uses highly developed software for control and analysis to measure absolute concentrations of molecules in real time.
Measured Species: CxHy, CO, CO2, NO, NO2, N2O, NH3, NF3, BCl3, B2H6, SiF4,... contact us with your requirements.
Applications:
- on-line process control in surface treatment (e.g. semiconductor, automobile, plastics industry)
- exhaust gas and environmental monitoring (e.g. trace gas analysis or explosive detection)
- diagnostics in medicine, drug detection
- leak testing
- high sensitivity gas analysis for the chemical or pharmaceutical industry
- Free Space Optics (FSO)
Expertise:
Neoplas Control GmbH is a center of competence for gas and plasma diagnostics and environmental technology. It is a spin-off of the INP Greifswald (Institute of Low Temperature PlasmaPhysics). Q-MACS represents an outstanding solution for on-line process control and measurement applications for gas and plasma. Lightspeed Technologies distributes and supports these systems in the United States and provides engineering services in addition to quality products.
Technology:
The Q-MACSystem was developed by the INP Greifswald and is now produced and distributed by Lightspeed Technologies in the United States for Neoplas Control. It is a compact and user friendly quantum cascade laser measurement and control system developed to monitor and control plasma processes and to detect trace gases with high sensitivity (sub-ppb). Q-MACS combines the advantages of absorption spectroscopy in the mid infrared spectral range with the unique propertiesof quantum cascade lasers (QCL). In combination with thermo-electric cooled infrared detectors, Q-MACS is well suited for industrial applications, in particular for on-line process monitoring. Q-MACS needs nearly no maintenance and due to its modular design it can be individually adapted to customer requirements inside industrial processes.
Q-MACS Concept:
Up to now the on-line control of plasma processes was not feasible and trace gas analysis in the ppb range rather difficult. The idea to design Q-MACS is based on the recent development and commercial availability of a new laser class, the quantum cascade laser. This new option has made it possible to bring a compact and user friendly system for measurement and control of industrial processes to the market.
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